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Beilstein J. Nanotechnol. 2017, 8, 358–371, doi:10.3762/bjnano.8.38
Figure 1: The dimensions of the basic cantilever design. The gray zone is the piezoelectric layer. The zoomed...
Figure 2: (a)–(d) The first four mode shapes of the cantilever from the FE model. (e)–(f) The modes measured ...
Figure 3: The instrumentation circuits. (a) The voltage driven arrangement. (b) The charge driven arrangement....
Figure 4: The electrical model of a piezoelectric device.
Figure 5: The experimental setup to characterize the cantilever designs.
Figure 6: Voltage drive magnitude responses of the cantilevers C1–C4. (a)–(d) The responses from input voltag...
Figure 7: Charge driven magnitude responses of the cantilevers C1–C4. (a)–(d) The responses from input voltag...
Figure 8: Amplitude noise density spectra of the output voltage Vo for the reference cantilever C1 and optimi...
Figure 9: To perform multifrequency AFM using cantilever C2 with modes M1 and M2 simultaneously, the presente...
Figure 10: The layout of the piezoelectric layer on the cantilever to optimally actuate and sense M1–M4. The c...